ASTM F1709-97

$30.00

Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications
standard by ASTM International, 01/01/1997

Document Format: PDF

Description

1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging.

Product Details

Published:
01/01/1997
Number of Pages:
3
File Size:
1 file , 35 KB
Note:
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